• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention is concerned with a method of and an arrangement for performing optical interference measurements by use of integrated optical means. The arrangement is comprised of a multi-mode waveguide mounted on a carrier means. A cover layer of dielectric material is disposed upon said multi-mode waveguide. The refractive index of the dielectric cover-layer is greater than that of the waveguide. Two modes are coupled to the waveguide the effective refractive indices of said modes differ from each other in such a manner that an interference period results which is detected through a sequence of photodetectors, being arranged in the cover layer and energetically coupled to the waveguide. The relative phase position of both modes varied through a measuring operation is measured. One of the photodetectors is employed to incrementally count the phase displacements and the other photodetectors are operative as an optical vernier so subdividing the scale in dependence on the number of photodetectors.
    公开号:SU1003004A1
    申请号:SU797770573
    申请日:1979-05-16
    公开日:1983-03-07
    发明作者:Дренкхен Йюрген；Тринкс Роланд
    申请人:Феб Карл-Цейсс-Йена (Инопредприятие)；
    IPC主号:
    专利说明:

    one
    The invention relates to optointegrating devices for the incremental measurement of length or angles.
    An optical integrating j device for interference measurement is known. In this case, the beam of light inside the waveguide layer is first partially transmissive element decomposed into two components, which are conducted through the reflecting elements in the place where it is located. A second partial transmission element is designed to collect both components of the beam and to allow for interference.
    The manufacture of such a device with the necessary certain accuracy of the reflected and transmitted properties of individual elements can only be realized with great expense. In addition, for the operation of the measuring device, the relative position of the reflective elements with respect to the partially transmissive elements is decisive. This results in technological difficulties.
    The purpose of the invention is the development of an optical integrating device
    for an interference measurement, which would have, in relation to macro-optical performances, the advantage of a small overall design, low manufacturing costs, a wide sensitivity with respect to temperatures of 1 m and vibrations and little energy consumption.
    The invention is based on the task of eliminating the aforementioned disadvantages of the prior art by applying an optical integrating device. The instrument should be used universally for measuring lengths, angles, temperature changes, and the like.
    This task according to the invention is solved by an opto-integrating device consisting of a multi-mode waveguide 7-16 on the dielectric layer connected to the waveguide and offset by 11/20 A on the dielectric layer.
    According to the invention, the advantage is that the first | photodetector is 7 p yes photodetectors; 7-16 the following can be set
    photoadjust shifted by a quarter of the interference period.
    The drawing shows possible embodiments of the device.
    On the carrier 1 there is a two-mode waveguide 2, covered with a dielectric layer 3, the effective optical refractive power of which was less than that of the waveguide. At one end of the waveguide, there is a coupling grating 4. The first laser beam 5, containing a TED type wave, falls at a synchronous angle for the given wave onto the coupling grating 4, so that the TEP type waveguide 2 is excited. The second laser beam b, A wavelength type TE wave is directed at a synchronous angle inherent to this wave to the coupling grid 4. In waveguide 2, a wave of type TE is simultaneously excited. Waveguide 2 must have such properties that the effective refractive indices of the type TED and wave type of and TE were only slightly different from each other.
    The following values can be given as an example.
    THOSE,
    Eff,
    EFF
     is effective pop
    Eff is a refractive index in the direction of energy distribution;
    Chvolnovy number in the direction; k
    wave number of laser light;
    4k-, the difference of wave numbers in the direction.
    If the values of 1 differ by 57, then a reference sample is formed in the waveguide, having a z period in the direction of z
    2Ji
    r. On the waveguide surface at a distance of 420 µm, narrow binding grids with a width of rJ 20 µm were installed. These lattices (not shown in the drawing) have low power output efficiency. Selected
    These arrays supply energy to the photodiodes 7–16, which are glued to the dielectric layer 3. Based on the lateral displacement of the photodiodes with respect to the intensity maximum, the recorded intensity continuously decreases in the given example in the z direction. If the laser beam 5 and laser beam b are formed in the order of + 1 and - 1 of the diffraction maximum of the spectrum of the irradiated lattice scale, then the interference band pattern moves in the waveguide in the z direction by 2Л if the measuring lattice is shifted by one grating period. With the help of the first photodetector 7, an incremental reading in units of the half-period of the measuring grid is performed. Photodetectors 7-16, shifted relative to each other by 11/207. , form an optical vernier in their totality, so that 1/20 of the measuring grid period can be taken as a unit of measurement. If next to the first photodetector 7, the next photodetector not shown in the figure, which is offset from
    relatively first on
    then you can
    four .
    will distinguish the forward and backward movement of the measuring grid. The lines depicted in the waveguide represent a schematic intensity distribution.
    权利要求:
    Claims (1)
    [1]
    1. The optical integrating device, which consists between
    A carrier and a dielectric layer of a multimode waveguide, characterized in that the dielectric layer has a series of 45 7-16 photodetectors displaced one with respect to the other, respectively 11/20 L., are energetically connected with the waveguide,
    2, the device according to claim 1, characterized in that the first
    5Q photodetector 7 p yes photodetectors 7-16. The next photodetector is installed, shifted by a quarter of the interference, period.
    Recognized as an invention according to the results of the examination carried out
    The Office for the Invention of the German Democratic Republic,
    7 S 9 L // L fJ 74f ff fff „X
    fa
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    同族专利:
    公开号 | 公开日
    DD137022B1|1981-07-29|
    US4324492A|1982-04-13|
    DD137022A1|1979-08-08|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US3560724A|1968-08-19|1971-02-02|Us Navy|Optical correlators|
    US3674335A|1970-05-25|1972-07-04|Bell Telephone Labor Inc|Light wave coupling into thin film light guides|FR2613826B1|1987-04-07|1990-10-26|Commissariat Energie Atomique|MOTION SENSOR IN INTEGRATED OPTICS|
    EP1221581A1|2001-01-04|2002-07-10|Universität Stuttgart|Interferometer|
    US6856733B2|2001-12-07|2005-02-15|Intel Corporation|1xN fanout waveguide photodetector|
    US9267891B2|2011-06-06|2016-02-23|The Regents Of The University Of California|Multiplex fluorescent particle detection using spatially distributed excitation|
    CN104081175A|2012-04-25|2014-10-01|惠普发展公司，有限责任合伙企业|Analyzing light by mode interference|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DD20570678A|DD137022B1|1978-06-01|1978-06-01|Integrated-optical arrangement|
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